Stroke 行程 |
X axis:± X軸:± |
X axis:± X軸:± |
X axis:± X軸:± |
X axis:± X軸:± |
X axis:± X軸:± |
Y axis:± Y軸:± |
Y axis:± Y軸:± |
Y axis:± Y軸:± |
Y axis:± Y軸:± |
Y axis:± Y軸:± |
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θaxis:±3° θ軸:±3° |
θaxis:±3° θ軸:±3° |
θaxis:±2.5° θ軸:±2.5° |
θaxis:±3° θ軸:±3° |
θaxis:±3° θ軸:±3° |
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Table size工作臺尺寸 |
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Base size 基座尺寸 |
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Height高度 |
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Motor 電機 |
Setpping motor 步進馬達 |
Setpping motor 步進馬達 |
Setpping motor 步進馬達 |
Setpping motor 步進馬達 |
Servomotor 伺服馬達 |
Stage material 平臺材質 |
Lron :low temperature black chrome plating treatment Aluminum :Black alumite treatment 鐵：低溫黑色鉻處理 鋁：黑色耐酸鋁處理 |
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Weight重量 |
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Resolution(factory seting)分辨率（出廠時設定） |
0.2μm/pulse |
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Repetitive bing accuracy 重復定位精度 |
Within±1μm ±1μm以內 |
Within±0.7μm ±0.7μm以內 |
Within±1μm ±1μm以內 |
Within±1μm ±1μm以內 |
Within±0.7μm ±0.7μm以內 |
Lost motion 無效運動 |
Within3μm 3μm以內 |
Within2μm 2μm以內 |
Within2μm 2μm以內 |
Within2μm 2μm以內 |
Within2μm 2μm以內 |
Load carrying capacity when stopped (Distributed load in the vertical direction) 靜止時負載功率（垂直方向等分布載荷） |
50N |
500N |
1000N |
2000N |
3000N |
Load carrying capacity when moving (Distributed load in the vertical direction) 移動時負載功率（垂直方向等分布載荷） |
10N |
100N |
200N |
400N |
500N |
Degree of parallelism平行度 |
30μm |
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To other stsyem 至其他設置 |
Motor driver 電機驅動 |
Motor cable 電機電纜 |
Sensor cable 傳感器電纜 |
Sequencer 定序器 |
Camera 攝像機 |
Image Processing System 圖像處理裝置 |
(chip components ,PCB,FPC) (LCD,EL, touch panel ,solar cell)
絲網打印機 面板貼合、COG、FOG、貼裝裝置
(片狀部件、PCB、電路板、FPC電路板) (LCD、EL、觸摸面板民、太陽能電池)
曝光機 探測器檢測裝置
(片狀部件/PCB電路板/FPC電路板) (PBC電路板、水晶設備、電子部件、FPD亮燈檢測)
Ultra Slim Stage with Electric Actuators arranged on the Same Plan
將電動傳動裝置安裝于同一平面上的超薄型平臺
Employs a slider with a “preload double slide ” construction that consists of a middle plate inserted between upper and ower plates
Features an array of balls arranged between each plate that enables smooth ,flat plane rolling motion
A simple , ultra slim construction with a low center of gravity achieved by the three actuators bed on the same plane
This construction contributes to device miniaturization
滑動部分采用的結構是通過上下2片板將中間板夾住的“預滑型雙滑動”構造。
要各板這間裝有多個滑珠，實現(xiàn)了平穩(wěn)的平面滾動運動。
而且由于3個傳動裝置安裝在同一個平面上，因此實現(xiàn)了低重心，超薄型的簡單構造。對裝置的小型化做出了貢獻。
Ultra slim and simple construction Small footprint
超薄型簡單構造 節(jié)省空間
商精度定位 低重心平臺
高剛性
1
2
Driving each of 3 actuators arranged on the same plane enables a variety of table movement.
使安裝在同一平面上的3個傳動裝置各自進行動作以此進行動作,以此可實現(xiàn)各種工作臺動作.
Driving the V and W axes the same amount in the same direction moves the Y direction 使V、W軸在同一方向上進行相同的動作，則工作臺向Y方向移動 Driving the U axis moves the table in the X direction使U軸動作,則工作臺向X方向動
Example of rotating the table using the table center as the axis of rotation (θ axis)這是工作臺以工作臺中心為旋轉中心進行旋轉（θ軸）的示例 Driving the V and W axes the same amount in the same direction while driving the U axis moves the table diagonally 使V、W軸在同一方向上進行相同量的動作，同時也使U軸動作，則工作臺向傾斜方向移動
Example of rotating the table using an arbitrary point as the axis of rotation(θ axis).這是工作臺以任意點為中心進行旋轉（θ軸）的示例
