ZR中國(guó)用于無(wú)氧焊接,純水超聲波清洗,
潔凈室半導(dǎo)體用高純凈型壓力表
高純凈型壓力表YTJ
High Purity Pressure Gauge
型號(hào)標(biāo)示Model: YTJA YTJB YTJE
產(chǎn)品概述Brief introduction：
YTJ 高純凈型壓力表主要應(yīng)用于半導(dǎo)體領(lǐng)域。產(chǎn)品根據(jù)潔凈度等級(jí)，可分為 (YTJA) A 級(jí) (YTJB) / BA 級(jí)(YTJE) / EP 級(jí)3 種類型
The gauge is mainly used in semiconductor. It could be sorted to three kinds as class A, class BA and class EP by their purity degrees
◆ 根據(jù)使用特性可選擇SUS316Ti、SUS316、SUS316L 等不同材料的測(cè)壓元件。
It could choose the pressure elements of SUS316Ti, SUS316, SUS316L by your demand.
◆ 支持G1/4、NPT1/4、9/16-18UNF、1/4VCR（M）、1/4VCR（F）等多種連接形式。
It supports connection types as G1/4, NPT1/4, 9/16-18UNF, 1/4VCR(M), 1/4VCR(F) and so on.
◆ 所有零部件都經(jīng)過(guò)超聲波純水處理。
All the parts would be dealt with by ultrasonic pure-water.
◆ 選用無(wú)氧真空室的高純氬氣保護(hù)焊接作業(yè) 。
Protect welding work with the high purity argon.
◆ 產(chǎn)品經(jīng)過(guò)嚴(yán)格的耐壓及氣密性檢測(cè)。氣密性可達(dá)到1 × 10-10 Pa·m3/s。
With strict detection of compression resistance and airproof which could achieve 1 × 10-9 Pa·m3/s.
◆ 測(cè)量范圍：-0.1~0 至0-35MPa。
Measure ranges: 0.1~0MPa to 0-35MPa.
◆ 示值精度：1.5%；2.5%。
Accuracy: 1.5%; 2.5%.
高純凈表潔凈度等級(jí)The Clean Grade of the High-Purity Pressure Gauge
無(wú)氧焊接Welding without oxygen
A 級(jí)A Grade :
清洗：藥液超聲波清洗，純水超聲波清洗
Washing: Clean with medicine liquid ultrasonic, pure water ultrasonic washing
組裝調(diào)試：潔凈室（潔凈度10000）
Installation and debugging: Clean room (Clean Grade 10000)
包裝：N2 氣體吹掃，密封包裝
Package: N2 gas b away, seal package
純水超聲波清洗 Pure water ultrasonic washing
BA 級(jí)BA Grade:
零件：（氣體接觸部位）機(jī)械拋光處理
Part: (Gas contact part) machine polishing
清洗：藥液超聲波清洗，純水超聲波清洗
Washing: Clean with medicine liquid ultrasonic
潔凈度：等級(jí)VI（ASME B40，1 Level）
Clean Grade: VI (ASME B40,1 Level)
組裝調(diào)試：潔凈室（潔凈度10000 ISO Class4）
Installation and debugging: Clean room (Clean Grade 10000 ISO Class4)
工作臺(tái)（潔凈度100 ISO Class2）
Working desk (Clean Grade 100 ISO Class2)
包裝：N2 氣體吹掃，PET 袋真空密封包裝
Package: N2 gas b away, seal package with vacuum PET bag
潔凈室操作Clean room operation
EP 級(jí)EP Grade:
零件：（氣體接觸部位）電解拋光
Part: (Gas contact part) electrolyte polishing
清洗：藥液超聲波清洗，純水超聲波清洗
Washing: Clean with medicine liquid ultrasonic
潔凈度：(ISO Class 1) 在0.1 μm以上的肉眼不可見(jiàn)微粒子數(shù)量10 個(gè)以內(nèi)。
Clean Grade: (ISO Class 1) less than 10 corpuscule which is bigger than 0.1μm can not seen with people eyes.
組裝調(diào)試：潔凈室（潔凈度1000 ISO Class3） 工作臺(tái)（潔凈度100 ISO Class2）
Installation and debugging: Clean room (Clean Grade 1000 ISO Class3)
Working desk (Clean Grade 100 ISO Class2)
包裝：N2 氣體吹掃，PET 袋真空密封包裝
Package: N2 gas b away, seal package with vacuum PET bag
幾種規(guī)格產(chǎn)品 Several Specification
徑向直接安裝AO Stem mounting; bottom connection
軸向嵌裝ZT Flush mounting; back connection
量程范圍規(guī)格代碼表 TABLE OF RANGES
選型代碼code 量程規(guī)格ranges
M510 -0.1-0.06 MPa M030 0.1 MPa M160 10 MPa
M515 -0.1-0.1 MPa M040 0.16 MPa M180 16 MPa
Ｍ520 -0.1-0.15 MPa M60 0.25 MPa M200 6 MPa
Ｍ530 -0.1-0.3 MPa M080 0.4 MPa M220 10 MPa
M540 -0.1-0.5 MPa M100 0.6 MPa M230 16 MPa
M550 -0.1-0.9 MPa M120 1.0 MPa M240 25 MPa
M560 -0.1-1.5 MPa M140 1.6 MPa M260 35 MPa
M570 -0.1-2.4 MPa
Kg/psi; KPa/psi; psi/bar 刻度標(biāo)示可選available
儀表外型尺寸及連接示意圖Type, dimension and connection scheme
連接Connection G1/4、NPT1/4、9/16-18UNF
連接Connection 9/16 -18 UNF(M) 1/4 VCR(M)
連接Connection 1/4 VCR(F)
如何選型 HOW TO ORDER
型號(hào)代碼特性說(shuō)明 CODE CHARACTERISTICS設(shè)
基本型號(hào)Basic type
YTJA A 級(jí)不銹鋼潔凈型壓力表Stainless Steel clean type pressure gauge
YTJB BA 級(jí)不銹鋼潔凈型壓力表Stainless Steel clean type pressure gauge
YTJE EP 級(jí)不銹鋼潔凈型壓力表Stainless Steel clean type pressure gauge
外徑Diameter
040 Ф 40mm
050 Ф 50mm
安 裝 方 式Mounting
AO 徑向無(wú)邊 Stem mounting, bottom connection, no flange
ZO 中軸向無(wú)邊 Flush mounting, back connection, no flange
ZT 中軸向前邊 Flush mounting, back connection, front flange
設(shè)計(jì)代碼Design
54 不銹鋼外殼，旋緊式Stainless Steel case, screw type
量 程Diameter
M120 1MPa 詳見(jiàn)量程代碼表 See the table of range
連 接 螺 紋Connection
G1/4 G1/4” Z14 NPT1/4” U10 9/16-18UNF
V20 VCR(M) V30 VCR(F)
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