多線(xiàn)切割是一種通過(guò)金屬絲的高速往復(fù)運(yùn)動(dòng)，把磨料帶入半導(dǎo)體加工區(qū)域進(jìn)行研磨，將半導(dǎo)體等硬脆材料一次同時(shí)切割為數(shù)百片薄片的一種新型切割加工方法
使用壽命長(zhǎng)
閉環(huán)控制
收放線(xiàn)卷徑
高穩(wěn)定性
| X2-MH高慣量系列 | 脈沖控制驅(qū)動(dòng)器 | CANopen控制驅(qū)動(dòng)器 | EtherCAT控制驅(qū)動(dòng)器 | 脈沖控制驅(qū)動(dòng)器 | CANopen控制驅(qū)動(dòng)器 | |
| 50W | SV-X2MH005A-N2CA | SV-X3EA010A-A2 | SV-X3EN010A-A2 | SV-X3EB010A-A2 | SV-X2EA010A-A | SV-X2EN010A-A |
| SV-X2MH005A-B2CA | ||||||
| SV-X2MH005A-N2CN | ||||||
| SV-X2MH005A-B2CN | ||||||
| 100W | SV-X2MH010A-N2CA | SV-X3EA010A-A2 | SV-X3EN010A-A2 | SV-X3EB010A-A2 | SV-X2EA010A-A | SV-X2EN010A-A |
| SV-X2MH010A-B2CA | ||||||
| SV-X2MH010A-N2CN | ||||||
| SV-X2MH010A-B2CN | ||||||
| 150W | SV-X2MH015A-N2CA | SV-X3EA020A-A2 | SV-X3EN020A-A2 | SV-X3EB020A-A2 | SV-X2EA020A-A | SV-X2EN020A-A |
| SV-X2MH015A-B2CA | ||||||
| SV-X2MH015A-N2CN | ||||||
| SV-X2MH015A-B2CN | ||||||
| 200W | SV-X2MH020A-N2CA | SV-X3EA020A-A2 | SV-X3EN020A-A2 | SV-X3EB020A-A2 | SV-X2EA020A-A | SV-X2EN020A-A |
| SV-X2MH020A-B2CA | ||||||
| SV-X2MH020A-N2CN | ||||||
| SV-X2MH020A-B2CN | ||||||
| 400W | SV-X2MH040A-N2CA | SV-X3EA040A-A2 | X3EN040A-A2 | SV-X3EB040A-A2 | SV-X2EA040A-A | SV-X2EN040A-A |
| SV-X2MH040A-B2CA | ||||||
| SV-X2MH040A-N2CN | ||||||
| SV-X2MH040A-B2CN | ||||||
| 750W | SV-X2MH075A-N2CA | SV-X3EA075A-A2 | SV-X3EN075A-A2 | SV-X3EB075A-A2 | SV-X2EA075A-A | SV-X2EN075A-A |
| SV-X2MH075A-B2CA | ||||||
| SV-X2MH075A-N2CN | ||||||
| SV-X2MH075A-B2CN | ||||||
| 1KW | SV-X2MH100A-N2LA | SV-X3EA100A-A2 | SV-X3EN100A-A2 | SV-X3EB100A-A2 | SV-X2EA100A-A | SV-X2EN100A-A |
| SV-X2MH100A-B2LA | ||||||
| SV-X2MH100A-N2LN | ||||||
| SV-X2MH100A-B2LN | ||||||
| 1.5kw | SV-X2MH150A-N2LA | SV-X3EA150A-A2 | SV-X3EN150A-A2 | SV-X3EB150A-A2 | SV-X2EA150A-A | SV-X2EN150A-A |
| SV-X2MH150A-B2LA | ||||||
| SV-X2MH150A-N2LN | ||||||
| SV-X2MH150A-B2LN | ||||||
| X2-MHH超高慣量系列 | 脈沖控制驅(qū)動(dòng)器 | CANopen控制驅(qū)動(dòng)器 | EtherCAT控制驅(qū)動(dòng)器 | 脈沖控制驅(qū)動(dòng)器 | CANopen控制驅(qū)動(dòng)器 | |
| 100W | SV-X2MH010H-N2CA | SV-X3EA020A-A2 | SV-X3EN020A-A2 | SV-X3EB020A-A2 | SV-X2EA020A-A | SV-X2EN020A-A |
| SV-X2MH010H-B2CA | ||||||
| SV-X2MH010H-N2CN | ||||||
| SV-X2MH010H-B2CN | ||||||
| 200W | SV-X2MH020H-N2LA | SV-X3EA020A-A2 | SV-X3EN020A-A2 | SV-X3EB020A-A2 | SV-X2EA020A-A | SV-X2EN020A-A |
| SV-X2MH020H-B2LA | ||||||
| SV-X2MH020H-N2LN | ||||||
| SV-X2MH020H-B2LN | ||||||
| 400W | SV-X2MH040H-N2CA | SV-X3EA040A-A2 | X3EN040A-A2 | SV-X3EB040A-A2 | SV-X2EA040A-A | SV-X2EN040A-A |
| SV-X2MH040H-B2CA | ||||||
| SV-X2MH040H-N2CN | ||||||
| SV-X2MH040H-B2CN | ||||||
| 750W | SV-X2MH075H-N2LA | SV-X3EA075A-A2 | SV-X3EN075A-A2 | SV-X3EB075A-A2 | SV-X2EA075A-A | SV-X2EN075A-A |
| SV-X2MH075H-B2LA | ||||||
| SV-X2MH075H-N2LN | ||||||
| SV-X2MH075H-B2LN |
