示波器檢查驅(qū)動器的電流輸出端時，發(fā)現(xiàn)它全為噪聲，無法讀出 故障原因：電流輸出端沒有與交流電源相隔離(變壓器)。 處理方法：可以用直流電壓表檢測觀察。 2、電機在一個方向上比另一個方向跑得快 (1)故障原因：無刷電機的相位搞錯。 處理方法：檢測或查出正確的相位。 (2)故障原因：在不用于測試時，測試/偏差開關(guān)打在測試位置。 處理方法：將測試/偏差開關(guān)打在偏差位置。 (3)故障原因：偏差電位器位置不正確。 處理方法：重新設(shè)定。 3、電機失速 (1)故障原因：速度反饋的性搞錯。 處理方法：可以嘗試以下方法。 a.如果可能，將位置反饋性開關(guān)打到另一位置。(某些驅(qū)動器上可以) b.如使用測速機，將驅(qū)動器上的TACH+和TACH-對調(diào)接入。 c.如使用編碼器，將驅(qū)動器上的ENC A和ENC B對調(diào)接入。 d.如在HALL速度模式下，將驅(qū)動器上的HALL-1和HALL-3對調(diào)，再將Moto r-A和Motor-B對調(diào)接好。(2)故障原因：編碼器速度反饋時，編碼器電源失電。 處理方法：檢查連接5V編碼器電源。確保該電源能提供足夠的電流。如使 用外部電源，確保該電壓是對驅(qū)動器信號地的。APPLIED MATERIALS 3700-01932 O-RING, 1.612 X .103 IN KALREZ
APPLIED MATERIALS 3700-01942 O-RING
APPLIED MATERIALS 3700-01963 ORING ID 8.484 CSD .139 KALRAZ 2037
APPLIED MATERIALS 3700-01991 O-RING, CHEMRAZ, 2.734 CSD, SG
APPLIED MATERIALS 3700-02003 O-RING,KALREZ
APPLIED MATERIALS 3700-02013 O-RING
APPLIED MATERIALS 3700-02032 ORING ID 8.975 CSD .210, ASP CHAMBER LID
APPLIED MATERIALS 3700-02075 O-RING EXHAUST PORT
APPLIED MATERIALS 3700-02079 O-RING ID 2.050CSD .103 VITON 75 DURO BRN
APPLIED MATERIALS 3700-02095 O-RING, .139 X 11.984
APPLIED MATERIALS 3700-02106 O-RING, 8.484 ID X .139 IN,(AS-568A-268)CHEMRAZ
APPLIED MATERIALS 3700-02112 AS-568A-278 O-RING KALREZ 2037
APPLIED MATERIALS 3700-02114 O-RING, .234 ID X .139 CX IN, KALREZ
APPLIED MATERIALS 3700-02116 O-RING, 3/16 X 5/16 X 1/16, AS-568A-008(KALREZ)
APPLIED MATERIALS 3700-02134 1.362 X 0.103 CX IN,KALREZ
APPLIED MATERIALS 3700-02135 O-RING, 11.484 X .139" DURO WHITE
APPLIED MATERIALS 3700-02153 O-RING, 0.546 ID X 0.139 CX IN
APPLIED MATERIALS 3700-02155 O-RING
APPLIED MATERIALS 3700-02156 O-RING ID 11.975 CSD .210 CHEMRAZ
APPLIED MATERIALS 3700-02157 ORING ID 13.975 CSD .210 CHEMRAZ SC513
APPLIED MATERIALS 3700-02160 AS-568A O-RING KALRAZ 4079 BLK
APPLIED MATERIALS 3700-02161 AS-568A-378 O-RING KALREZ 4079
APPLIED MATERIALS 3700-02162 KALREZ O-RING
APPLIED MATERIALS 3700-02163 O-RING, AS568A-383 KALREZ 4079
APPLIED MATERIALS 3700-02173 O-RING ID 1.989 CSD .070 KALREZ
APPLIED MATERIALS 3700-02178 O-RING
APPLIED MATERIALS 3700-02181 O-RING, 2-1/8 OD X 1/8 CSD, CHEMRAZ SS520
APPLIED MATERIALS 3700-02183 ORING ID .546 CSD .139 VITON BLK (PACK OF 10)
APPLIED MATERIALS 3700-02184 KALREZ O-RING
APPLIED MATERIALS 3700-02211 ORING ID .674 CSD .103 CHEMRAZ SC513
APPLIED MATERIALS 3700-02217 O-RING ID 12.975 CSD .210 KALREZ 4079 75D
APPLIED MATERIALS 3700-02255 O-RING
APPLIED MATERIALS 3700-02259 SEAL, ID 5.609 CS .121 X .146 CHEMRAZ
APPLIED MATERIALS 3700-02262 ORING SLIT DOOR
APPLIED MATERIALS 3700-02271 AS-568A-223 O-RING KALREZ 2037
APPLIED MATERIALS 3700-02273 O-RING ID .362 CSD .103 KALREZ AS-568A-110
APPLIED MATERIALS 3700-02307 O-RING
APPLIED MATERIALS 3700-02337 ORING ID 6.750 CSD.139
APPLIED MATERIALS 3700-02364 SEAL CTR RING ASSY NW200 VITON ORING &
APPLIED MATERIALS 3700-02379 ORING ID 11.475 CSD .210 CHEMRAZ SC520
APPLIED MATERIALS 3700-02390 O-RING ID .906 CSD .137 (CHEMRAZ)
APPLIED MATERIALS 3700-02412 O-RING,.644ID,.087CSD,KALREZ
APPLIED MATERIALS 3700-02413 O-RING,ID 1.850, CSD .210, CHEMRAZ SD513
APPLIED MATERIALS 3700-02425 DOVE TAIL O-RING
APPLIED MATERIALS 3700-02433 O-RING
APPLIED MATERIALS 3700-02436 O-RING ID .359 CSD .139 VITON 7
APPLIED MATERIALS 3700-02440 GAS BOX O-RING
APPLIED MATERIALS 3700-02441 GAS BOX O-RING
APPLIED MATERIALS 3700-02445 O-RING, BAROTRON TO CHAMBER
APPLIED MATERIALS 3700-02495 ORING ID 3.734 CSD .139 KALRAZ 80 DURO
APPLIED MATERIALS 3700-02507 SEAL ID8.628 X1.378CSD.468 SS513 NO HOLE
APPLIED MATERIALS 3700-02507 SEAL ID8.628 X1.378CSD.468 SS513 NO HOLE
APPLIED MATERIALS 3700-02517 O-RING,ID .209CSD .070 BUNA (PACK OF 10)
APPLIED MATERIALS 3700-02521 O-RING ID 2.425 CSD .103 KALREZ
APPLIED MATERIALS 3700-02573 SEAL EMI ORING .426ID .070CSD BR- CU-SI-
APPLIED MATERIALS 3700-02575 SEAL CARTRIDGE, DEUBLIN, KIT
APPLIED MATERIALS 3700-02646 ORING 1.424 CSD .103 KALREZ
APPLIED MATERIALS 3700-02666 ORING ID .296 CSD .139 KALREZ
APPLIED MATERIALS 3700-02668 ORING SEPARATION ID 20.680 K
APPLIED MATERIALS 3700-02670 O RING 10 10.975 CSD .210 CHEMRAZ SS51380
APPLIED MATERIALS 3700-02694 TRANSFER,LID,O,RING
APPLIED MATERIALS 3700-02721 SEAL BONDED SLIT VALVE 8.628X1.378 CHE
APPLIED MATERIALS 3700-02725 SEAL TAL 2.57500
APPLIED MATERIALS 3700-02728 SEAL BONNET DN100 SERIES 12 GATE VALVE
APPLIED MATERIALS 3700-02743 O-RING (PACK OF 4)
APPLIED MATERIALS 3700-02744 O-RING ID 12.984 CSD .139 VITON
APPLIED MATERIALS 3700-02747 O-RING
APPLIED MATERIALS 3700-02749 O-RING
APPLIED MATERIALS 3700-02749 O-RING
APPLIED MATERIALS 3700-02753* ORING ID 5.984 CSD .139 VITON 75DURO BRN
APPLIED MATERIALS 3700-02764 SEALASSY CTR RING/TRAPPED ORI
APPLIED MATERIALS 3700-02765 ORING ID 13.984 CSD .139 VITON
APPLIED MATERIALS 3700-02769 SEAL EXT FACE GLAND 1.12510
APPLIED MATERIALS 3700-02805 SEALEXT FACE GLAND .875ID PTF
APPLIED MATERIALS 3700-02810 SEAL SLIT VALVE DOOR 3.120-7.720 VITON
APPLIED MATERIALS 3700-02830 ORING ID .145 CSD .070 CHE A
APPLIED MATERIALS 3700-02845 O-RING
APPLIED MATERIALS 3700-02854 ORING ID .042 CSD .050 CHE FFTA
APPLIED MATERIALS 3700-02873 ORING ID 1.737 CSD .103 CHEMR
APPLIED MATERIALS 3700-02919 ORING (PACK OF 10)
APPLIED MATERIALS 3700-02944 SEAL SPR 14.000D
APPLIED MATERIALS 3700-02944 SEAL SPR 14.000D
APPLIED MATERIALS 3700-02950 ORING ID 1.551 CSD .122 CKMMA
APPLIED MATERIALS 3700-02952 ORING ID 10.178 CSD .112 SILICONE 70DURO
APPLIED MATERIALS 3700-03049 SEAL,QUAD RING,KALREZ
APPLIED MATERIALS 3700-03095 SEAL CTR RING ASSY NW25
APPLIED MATERIALS 3700-03104 ORING ID .145CSD .070 CHEMRAZ E38
APPLIED MATERIALS 3700-03113 FLAPPER, 1.0151D, 2-214 CH MR
APPLIED MATERIALS 3700-03186 O-RING,B DRIVE PULLEY FRONT BEARING COVER
APPLIED MATERIALS 3700-03357 ORING ID .208 CSD .070 KA.LREZ
APPLIED MATERIALS 3700-03464 SEAL CTR RING ASSY IS080 W/83
APPLIED MATERIALS 3700-03473 DOVETAIL SEAL U.S. PAT.NO.5,482,297
APPLIED MATERIALS 3700-03544 ORING ID 1.109 CSD .139 PARO
APPLIED MATERIALS 3700-03648 ORING ID .549 CSD .103 PAROFL
APPLIED MATERIALS 3700-03724 ORING ID .146 CSD .040 DUPRA
APPLIED MATERIALS 3700-03725 ORING ID .609 CSD .139 DUPRA
APPLIED MATERIALS 3700-03732 ORING ID 6.225 CSD .210 80 DU
APPLIED MATERIALS 3700-03747 SEAL CTR RING ASSY NW50 W/PTF
APPLIED MATERIALS 3700-03753 SEAL, QUAD-RING, 2.225ID 0.21
APPLIED MATERIALS 3700-03767 ORING ID 5.984 CSD .139 KALR
APPLIED MATERIALS 3700-03864 ORING ID 1.600 CSD .210 KALRE
APPLIED MATERIALS 3700-03866 ORING ID 10.975 CSD .210 KALR
APPLIED MATERIALS 3700-04088 ORING ID 1.475 CSD .210 KALRE
APPLIED MATERIALS 3700-04089 ORING ID 4.989 CSD .070 KALRE
APPLIED MATERIALS 3700-04477 KALREZ O-RING
APPLIED MATERIALS 3700-05668 SEAL BONDED SLIT VALVE 8.
APPLIED MATERIALS 3700-1309 O-RING, KALREZ ID.987 CSD.103 4079 QTZ
APPLIED MATERIALS 3700-50009 O-RING AS568-281 PERFLUOR
APPLIED MATERIALS 3700-90018 O-RING
APPLIED MATERIALS 3700-90123 O-RING 5.33D 253.371D BS
APPLIED MATERIALS 3700-90133 O-RING
APPLIED MATERIALS 3700-90156 O-RING
APPLIED MATERIALS 3700-90168 O-RING
APPLIED MATERIALS 3700-90183 O-RING
APPLIED MATERIALS 3700-90186 O-RING
APPLIED MATERIALS 3700-90192 O-RING
APPLIED MATERIALS 3700-90207 O-RING
APPLIED MATERIALS 3700-90210 O-RING
APPLIED MATERIALS 3700-90239 O-RING
APPLIED MATERIALS 3700-90246 O-RING ID 124.2 CS 5.7 V
APPLIED MATERIALS 3700-90263 0-RING SEAL, SN160 ISO VITON
APPLIED MATERIALS 3700-90267 O-RING
APPLIED MATERIALS 3700-90276 O-RING (SCAN ARM)
APPLIED MATERIALS 3700-90277 O RING BS 132 VITON
APPLIED MATERIALS 3700-90280 O-RING
APPLIED MATERIALS 3700-90293 O-RING
APPLIED MATERIALS 3700-90320 BS249 O-RING VITON
APPLIED MATERIALS 3700-90335 0-RING VITON 7851D X3C/S
APPLIED MATERIALS 3700-90351 SEAL,U-RING,PTFE/MOLY, 40ID
APPLIED MATERIALS 3700-90353 SEAL,ROD WIPER, PTFE, 40MM
APPLIED MATERIALS 3700-90415 O-RING
APPLIED MATERIALS 3700-90424 O-RING
APPLIED MATERIALS 3700-90441 SEAL,FERROFLUIDIC,1" BORE
APPLIED MATERIALS 3700-90461 O-RING
APPLIED MATERIALS 3700-90463 O-RING
APPLIED MATERIALS 3710-01014 SHAFT PRCN GND 1-1/4D X 24-3/8L SST
APPLIED MATERIALS 3710-01022 SHAFT PRCN GND 1/8DIA (PACK OF 10)
APPLIED MATERIALS 3710-01031 GROUND SHAFT
APPLIED MATERIALS 3710-01032 SHAFT GROUND
APPLIED MATERIALS 3710-01048 SHAFT, GND .4995DIA x 7.25L CLASS-L..
APPLIED MATERIALS 3710-01091 SHAFT SMALL
APPLIED MATERIALS 3710-01097 SHAFT ASSY PIVOT UPPER B
APPLIED MATERIALS 3720-00086 SHIELD, COVER WAFER LIFT
APPLIED MATERIALS 3740-00004 MNT LEVELING ANTI-VIBRATION 1
APPLIED MATERIALS 3740-01015 SHOCK,ABSORBER
APPLIED MATERIALS 3740-90006 SHOCK ABSORBER M20 X 19STROKE
APPLIED MATERIALS 3750-01023 TUBE QUARTZ PLASMA
APPLIED MATERIALS 3750-01094 ADPTR WAVEGUIDE FLANGE 2450 +/-50MHZ 5000W CONWVE
APPLIED MATERIALS 3750-01095 CNTRL TUNER MICROWAVE RPS FOR SMA-15A
APPLIED MATERIALS 3750-01104 WG MI ROWAVE SPACER STRAIG
APPLIED MATERIALS 3750-01105 WG MICROWAVE E-CORNER
APPLIED MATERIALS 3754HT06 HEATER HOSE KIT
APPLIED MATERIALS 3754MF06 MAINFRAME KIT
APPLIED MATERIALS 3760-00062 SLIDE,ROLLER,R3X150LGX40STR
APPLIED MATERIALS 3760-01014 SLIDE THREE MEMBER FULL EXT LOCK IN FULL
APPLIED MATERIALS 3760-01032 SLIDE,SIDE,MTG,2.106-HT
APPLIED MATERIALS 3760-01032 SLIDE,SIDE,MTG,2.106-HT
APPLIED MATERIALS 3760-01076 GUIDE,CASSETTE,2R
APPLIED MATERIALS 3760-01077 GUIDE,CASSETTE,2L
APPLIED MATERIALS 3760-01078 GUIDE,CASSETTE
APPLIED MATERIALS 3760-01078 GUIDE,CASSETTE
APPLIED MATERIALS 3760-01079 GUIDE,CASSETTE
APPLIED MATERIALS 3760-01087 SLIDE LINEAT LM GUIDE BALL SCREW
APPLIED MATERIALS 3760-01115 ASSY LINEAR ENCODER HEAD
APPLIED MATERIALS 3760-50011 FABS CASSETTE GUIDE
APPLIED MATERIALS 3760-90044 SLIDE - TELESCOPIC - 70KG
APPLIED MATERIALS 377-11361-00 SCREEN
APPLIED MATERIALS 3780-01011 PNEUMATIC SPRING 6" STROKE
APPLIED MATERIALS 3780-01022 SPRING
APPLIED MATERIALS 3780-01050 SPR CPRSN 2-1/4 FL .36OD
APPLIED MATERIALS 3780-01074 SPRING, EXT 3/4FL 1/40D .029 WIRE
APPLIED MATERIALS 3780-01106 SPR CPRSN,750FLX1200X.020 WIRE, ENDURA 5500
APPLIED MATERIALS 3780-01109 SPR PNEU POWERISE 6" STROKE 90LBS
APPLIED MATERIALS 3780-01121 SPRING,DC SOURCE
APPLIED MATERIALS 3780-01142 SPR CPRSN 1.250FL X .720OD X .072WIRE-DIA SST
APPLIED MATERIALS 3780-01296 SPR,GAS 40MM STRK 270MM EXT LG 8MM ROD
APPLIED MATERIALS 3780-01322 SPR CPRSN 1.25FL X .120OD X .016 WIRE SST
APPLIED MATERIALS 3780-01326 SPA GAS 16.14" MS MALE
APPLIED MATERIALS 3780-01346 SPR GAS TRACTION 450N 200MM
APPLIED MATERIALS 3780-02249 SPR RADIAL CANTED1.685IDX.215CH
APPLIED MATERIALS 3780-02328 SPR GAS 100MM-STRK 244MM-EL METAL-BALL
APPLIED MATERIALS 3780-02381 SPRING COMP .2400D X 1.50FL, 4.2 LB SST
APPLIED MATERIALS 3780-90126 SPRING,COM,4.57OD X .36 X 9.53
APPLIED MATERIALS 3790-00119 STDF F/F 6MM HEX M3 X 12MML (PACK OF 10)
APPLIED MATERIALS 3790-01038 STANDOFF 1'DX1"H FIBERGL
APPLIED MATERIALS 3790-01043 SPCR 1/2 DIA .194 ID AL
APPLIED MATERIALS 3790-01049 STAND-OFF 2" AUTOLOADER
APPLIED MATERIALS 3790-01055 STANDOFF F/F 1"DIAX1/1/4
APPLIED MATERIALS 3790-01098 STDF F/F 3/8DIA X 6.0 LGAL 10
APPLIED MATERIALS 3790-01128 STANDOFF M/F 1/4,HEX X 1/2LG AL6-32THD
APPLIED MATERIALS 3790-01131 STDF M/F 3/8 RND 10-32 X 1/2L SST (PACK OF 10)
APPLIED MATERIALS 3790-01201 STANDOFF, 5/16 X 3/8
APPLIED MATERIALS 3790-01204 SPACER, FLAT (PACK OF 10)
APPLIED MATERIALS 3790-01218 STDF M/F
