LIF系列高精度
|
Model |
Basline error |
Substrate and mounting |
Interpolation error |
Measuring length |
|
|
|
Accuracy grade |
Intervall |
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|
|
|
± 1 μm |
≤ ± 0.225 μm/ 5 mm |
Scale of Zerodur glass ceramic or glass, bonded with PRECIMET adhesive film |
± 12 nm |
70 mm to 1020 mm |
|
LIF 471/481
|
Linear scale |
LIF 401 R |
|
|
Measuring standard* Coefficient of linear expansion |
SUPRADUR phase grating on Zerodur glass ceramic or glass; grating period 8 μm αtherm = (0±0.1) · 10–6 K–1 (Zerodur glass ceramic) αtherm ? 8 · 10–6 K–1 (glass) |
|
|
Accuracy grade* |
±1 μm (only for Zerodur glass ceramic), ±3 μm |
|
|
Baseline error |
≤ ±0.225 μm/5 mm |
|
|
Measuring length ML* in mm |
70 120 170 220 270 320 370 420 470 520 570 620 670 720 770 820 870 920 970 1020 |
|
|
Reference marks |
One at midpoint of measuring length |
|
|
Mass |
0.8 g + 0.08 g/mm measuring length |
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|
|
|
|
|
Scanning head |
AK LIF 48 |
AK LIF 47 |
|
Interface |
1 VPP |
? TTL |
